The development of semiconductor integrated circuits has advanced by leaps and bounds. By the end of 2000, Intel reported that its line width has grown to 0.03m. Therefore, the improvement and maintenance of cleanliness is an important task in the design and operation of semiconductor device buildings. The amount of air delivered is at the expense of high energy consumption. Example of energy consumption Although the semiconductor device building has high energy consumption, it is effective to reduce the energy consumption by adopting a certain method in actual design and operation. The following takes a clean plant as an example to analyze the energy consumption status and energy saving measures of large-scale semiconductor device buildings. The clean air-conditioning part of the plant is a typical large-scale semiconductor device factory with a total construction area of ​​6869.1m2, and the total area of ​​clean air-conditioning is 3037.5m2, of which the clean room area of ​​the 100-class clean room is 210m2, and the temperature and humidity control range is t=231, 50%. The air exchange frequency is 400h-1, the positive pressure is 30Pa; the 10000-level clean room area is 1762m2, the temperature and humidity control range is t=232,=655%, the air exchange frequency is 40h-1, the positive pressure is 20Pa; the 100000-level clean room area is 1065.5m2. The temperature and humidity control range is t=253,=6510%, the number of air changes is 30h-1, and the positive pressure is 10Pa. The air conditioning system adopts the method of concentrating the fresh air treatment unit in series with each process area, and the total cooling load is 2725kW. The heat load is 2620kW, the total fresh air volume is 96947m3/h, the total air supply volume is 425027m3/h, and the total power consumption of the blower is 355kW.
From the control of temperature and humidity, the semiconductor device factory maintains a constant temperature and humidity throughout the year, and the energy consumption is much larger than that of the general office building air conditioner, especially in the transitional season. Because of the low temperature and high humidity of the outdoor air in the area, the air conditioning system is lowered. It is necessary to use about 7 cold water, and the supply air temperature also drops. When the process equipment is used at different times, the temperature in the clean room tends to be low, sometimes even lower than the control temperature of 5 or more, and it has to be heated to raise the temperature. A lot of energy is wasted, especially when the air supply is too large.
Energy-saving direction and measures, energy-saving direction, from the above analysis, it is known that the timely control of air supply according to the use of clean rooms is the main direction of energy saving for such plants. Controlling the amount of air supply must be combined with the control of the appropriate amount of fresh air and exhaust air. The methods of air volume control are as follows: fan number control; fan speed control; blade control; throttle control. Among them, the variable frequency motor control in the speed control is a more advanced air volume adjustment control method. The combination of the frequency converter and the computer control realizes a strong intelligent speed regulation performance, which has a great effect on improving the power saving effect. Energy-saving measures, in each new fan group, cycle unit and exhaust system, the inverter is used to modify the original fan motor control circuit to achieve stepless speed regulation of the fan motor. In the clean area, select the key control position to install the micro differential pressure transmitter, and monitor the positive pressure in the clean area to control the air supply volume of the new air blower unit. In each air supply system, select the high-efficiency filter air supply orifice plate of the key control system to install the micro differential pressure transmitter, monitor the static pressure in each air supply port to control the air volume of the circulating unit, and adapt to the change of the filter resistance. And can meet the requirements of cleanliness.
At the time of production, the amount of exhaust air is large; when not in production, the amount of exhaust air can be appropriately reduced. In the exhaust system, select the key control position to install the wind pressure transmitter, and adjust the fresh air supply volume with the micro differential pressure transmitter that monitors the positive pressure. The frequency conversion speed control system should be able to switch between production and non-production time conditions. It can manually switch the working conditions, start and shut down, or use the programmable controller to set the time to realize automatic delay switching. Since the fan will run at low speed, it is necessary to study the characteristics of the fan when the frequency conversion speed adjustment is carried out, so that the fan operates in the highest efficiency zone. Fans and exhaust fans should be equipped with fans with similar performance curves, preferably fans with flat performance curves to facilitate airflow balance. For the semiconductor device factory, in addition to the ventilation and air conditioning system, there are some other energy-saving measures that can be used, such as the use of variable frequency speed control technology for the circulating cooling water system and the cold water system, and recovering the heat (cold) taken away with the exhaust air. The amount is used for preheating (cold) fresh air; in winter, the cold water prepared by the cooling tower is not used for the air conditioner to cool down.
Pipe Making Machine is the equipment which process the pipes and tubes. There are two kinds tube making machine, one type is cold bending machines, which is in the condition of the room temperature, without any heating process, for example, the interlocked tube Roll Forming Machine, the Pipe Bending Machine and the downspout pipe roll forming machine. The other type is the hot bending machines, or hot processing machine. This kind machine is by improving the temperature on the tube, then bend the machine to certain shape or roll formed and welding, for example, the high frequency tube welding machine, the high frequency pipe bending machine, the high frequency pipe expanding machines.
Pipe Making Machine
Pipe Making Machine,Exhaust Pipe Rollformer,Car Exhaust Pipes Rollformer,Seamed Tubes Rollforming Line
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